[Translate to Japanese:]
Wet bench encompasses a large number of devices/applications where chemicals like acid/bases and solvents may be used. An example of a wet bench are chemical dip tanks for wafer etching. Front end of the line (FEOL) and back end of the line (BEOL) processes are typically where wet process tools are used. The typical applications here are etch, clean and strip. Wet bench devices must also be designed with cleanroom requirements in mind. For more details go to: Factory equipment,cleanroom and ESD.
[Translate to Japanese:]
[Translate to Japanese:]
Every clean room is different. Manufacturers must consider many factors, from the class of cleanroom through the range of uses to specific customer requirements. Structural elements such as walls, ceilings and air showers, ventilation and light fittings and the furnishings all need to be planned in detail. The right materials play an important role here.