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Chemical Mechanical Planarization (CMP)
Materials and solutions for CMP
Materials and solutions for Chemical Mechanical Planarization (CMP)
CMP is a method to produce a polished and flat wafer surface. This is necessary since after deposition of materials, the wafer surface is uneven. For subsequent layers, the surface must be planar. The technique involves attaching the wafer with a plastic retaning ring to a metal jig that brings the wafer in contact with an abrasive pad containing a slurry. The pad rotates and with physical and chemical force, the wafer is modified. See the picture below of a simplied CMP process.
Material properties
For CMP, plastics are used for the retainer ring and requirements are:
- Abrasion resistance
- Chemical resistance
Typical plastic materials used
- PEEK
has low wear rate and excellent chemical resistivity within high temperature resistance - PEEK (Ceramic filled)
excellent strength and dimensional stability - PET
good wear resistance at moderate temperatures - PPS
high abrasion and wear resistance
Röchling materials for CMP
PEEKEtroX® V natural
PEEKSustaPEEK natural
Arrange technical advice
The performance and service life of plastics for use in the semiconductor industry are influenced by a variety of factors. These criteria need to be considered in order to make the right choice in materials. Examples:
- Antistatic or conductive properties
- Operating temperature
- Contact with chemicals
- Design requirements
- Dimensions and tolerances
- Flame retardancy
We are happy to advise you on the selection of suitable materials for your particular application. Just use our contact form at the bottom of the page.
